随着我国航天、核工业等领域快速发展,对微小气体流量的精确测量提出了迫切需求。不论是月球样品封装装置中用到的真空漏率测量,还是载人飞船舱门检漏中用到的正压漏率测量,均与高精度微小气体流量测量技术密不可分。针对以上需求,航天510所通过十余年的持续研究,提出了微小气体流量测量、真空漏 With the rapid development of China’s aerospace, nuclear industry and other fields, there is an urgent need for precise measurement of the flow of minute gases. Both the vacuum leak rate measurement used in the lunar sample packaging device and the positive pressure leak rate measurement used in manned spacecraft door leak detection are closely related to the high precision micro gas flow measurement technology. In view of the above requirements, the space 510 has passed the continuous research of more than ten years and proposed the measurement of the micro gas flow, the vacuum leak