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研究了可溶性聚酰亚胺的溶剂体系，研究了聚酰亚胺在各种纯溶剂及混合溶剂体系中的溶解性能，各种溶剂体系的相对吸水能力，它们及对应的聚酰亚胺溶液与硅片表面的接触角。研究发现在聚酰亚胺的良溶剂ＮＭＰ、ＤＭＡ中可加入多至５０％体积的非溶剂乙二醇醚类，混合溶剂仍能溶解所研究的聚酰亚胺；而乙二醇醚的加入可有效地降低溶剂体系的吸水性。所研究的各种溶剂体系均可在硅片表面上完全铺展，而聚酰亚胺溶液与硅片表面的接触角随聚酰亚胺的浓度上升而明显上升，基本与所用的溶剂体系无关。
The solvent system of soluble polyimide was studied. The solubility of polyimide in various pure solvent and mixed solvent system was studied. The relative water absorption capacity of each solvent system, their corresponding polyimide solution and Contact angle of wafer surface. The study found that in the polyimide good solvent NMP, DMA can be added up to 50% by volume of non-solvent glycol ethers, the mixed solvent can still dissolve the polyimide under study; and the addition of glycol ethers Can effectively reduce the water absorption of the solvent system. All kinds of solvent systems studied can fully spread on the surface of silicon wafer. However, the contact angle between polyimide and silicon surface increases with the increase of polyimide concentration, which is basically independent of the solvent system used.