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提出了一种将声光可调滤光器技术应用于气体浓度测量的红外光谱系统。该系统以氙灯作为光源,TeO2晶体作为声光介质的色散元件,InGaAs光电二极管阵列作为多通道检测器,利用光纤探测和传输光信号,由计算机处理数据和显示结果。通过声光调制将宽带光变为单色光,通过超声射频的变化实现光谱扫描,可对不同气体进行快速测量,无机械调谐机构,结构简单。通过对甲烷气体的实验表明,该系统的有效光谱测量范围为900~1900nm,光谱分辨率为60nm,可用于对有害气体的在线检测。
An infrared spectroscopy system is proposed to apply the acousto-optic tunable filter technology to gas concentration measurement. The system uses a xenon lamp as a light source, a TeO2 crystal as a dispersive element of an acousto-optical medium, an InGaAs photodiode array as a multi-channel detector, an optical fiber for detecting and transmitting optical signals, and a computer processing the data and displaying the results. Through the acousto-optic modulation broadband light into monochromatic light, through the change of ultrasonic radio frequency spectrum scanning, different gases can be measured quickly, without mechanical tuning mechanism, the structure is simple. Experiments on methane gas show that the system has an effective spectral range of 900 ~ 1900 nm and a spectral resolution of 60 nm, which can be used for on-line detection of harmful gases.