【摘 要】
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A laser micromachining technique for the fabrication of metallic microstructures is proposed. The fabrication of microstructures is done by laser-induced wet etching that adopts an optical fiber as a machining tool. The laser beam delivered through the mu
【出 处】
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ChineseOpticsLetters
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A laser micromachining technique for the fabrication of metallic microstructures is proposed. The fabrication of microstructures is done by laser-induced wet etching that adopts an optical fiber as a machining tool. The laser beam delivered through the multimode fiber directly irradiates on the workpiece while maintaining a proper gap to avoid fiber damage. The manufacture of microstructures with high surface quality and good size uniformity is realized. Microgrooves with aspect ratio over 10 and microholes with a nearly straight cross-section can be produced by the proposed technique. The overall etching results are examined closely with respect to process variables.
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