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讨论了接触式激光干涉议的数据采集与处理系统，其特点是性能稳定，操作灵活。实验证明，该系统满足仪器分辨率为0．01μm，重复性误差在0．03μm以内的要求。
Discussed the contact laser interference data acquisition and processing system, which is characterized by stable performance, flexible operation. Experiments show that the system meets the requirement of instrument resolution of 0.01μm and repeatability error of 0.03μm.