一、前言离子束曝光方法具有两大特点:一是离子束在抗蚀剂中不散射;二是离子束具有高能量密度。这两大特点决定着离子束曝光方法有以下几个主要优点:(1) 高分辨率;(2) 抗蚀剂对离子束具有较高的灵敏度;(3) 除能对聚合物抗蚀剂进行曝光外,还能对其它某些 I. Introduction Ion beam exposure method has two major characteristics: First, the ion beam is not scattered in the resist; Second, the ion beam has a high energy density. These two major characteristics determine the ion beam exposure method has the following main advantages: (1) high resolution; (2) the resist has a high sensitivity to the ion beam; (3) in addition to the polymer resist For exposure, but also for some other