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针对前人的数学模型,对瑞奇角、旋转角和系统波像差这几个主要精度影响因素进行了仿真分析。结果表明:当瑞奇角的测量误差控制在0.5°以内时,对测量结果影响很小;由于平面镜的面形误差是连续和旋转对称的,所以旋转角测量误差对测量结果影响很小;当系统波像差系数的测量误差|ΔWn,m|≥0.05λ时会影响拟合精度。此仿真结果为提高大口径平面镜检测精度提供了理论依据。
According to the mathematical models of predecessors, the influencing factors such as Ricci angle, rotation angle and system wave aberration are simulated and analyzed. The results show that when the measurement error of Ricci angle is within 0.5 °, the influence on the measurement result is very small. Because the surface shape error of the plane mirror is continuous and rotationally symmetrical, the measurement error of the rotation angle has little effect on the measurement result. The measurement error of the system wave aberration coefficient | ΔWn, m | ≥ 0.05λ will affect the fitting accuracy. The simulation results provide a theoretical basis for improving the detection accuracy of large-aperture plane mirror.