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Puts forward a new method in machining microelectrode by electro chemical machining (ECM) and plastic deformed theory. Theprocedure of this method is to machine the microelectrode according to the basic rule of ECM theory at first. Then, with the change of ECM machining parameters, one of the microelectrode ends is exerted by a load. As a result, the elastic and plastic deformation is produced at the machining section and the microelectrode diameter is reduced.It has been proved that the proposed method can determine the optimum machining parameters to machine the microelectrode of Cu.