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在M7350A圆台平面磨床上采用薄膜反馈组合体节流形式静压磨头,其结构简单、性能好。本文重点介绍了薄膜反馈组合体节流器的设计计算及薄膜加工。
In the M7350A round table surface grinder film feedback combination of throttle type static pressure grinding head, its simple structure, good performance. This article focuses on the design and calculation of thin-film feedback combination choke and thin film processing.