A model for nanogrinding based on direct evidence of ground chips of silicon wafers

来源 :中国科学：技术科学英文版 | 被引量 : 0次 | 上传用户：yxsaisai

【摘要】

：

Nanometer chips were directly fabricated using face nanogrinding carried out by ultrafine diamond grits at room temperature. Direct evidence for ground nanomete

【作者】

：

ZHANG ZhenYu HUO YanXia GUO Do

【机构】

：

KeyLaboratoryforPrecisionandNon-TraditionalMachiningTechnologyofMinistryofEducation

【出处】

：

中国科学：技术科学英文版

【发表日期】

：

2013年9期

【关键词】

：

纳米芯片模型证据地面透射电子显微镜表面粗糙度硅片超细金刚石 nanometer chip nanogrinding surface rough

【基金项目】

：

This work was supported by the National Natural Science Foundation of China （Grant No. 91123013）, Tribology Science Fund of State Key Labor- atory of Tribology （Grant No. SKLTKF12A08）（Tsinghua Univer

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Nanometer chips were directly fabricated using face nanogrinding carried out by ultrafine diamond grits at room temperature. Direct evidence for ground nanometer chips is cuboid, and the average ratio of width to thickness is 1.49. Chips of 9.0 nm in thic

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A model for nanogrinding based on direct evidence of ground chips of silicon wafers

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