The reflection-absorption infrared (RAIR) was employed to study the crystallization kinetic of poly (ethylene terephthalate) (PET) ultrathin films. During isothermal crystallization the thinner PET film shows a slower kinetic compared with the thicker film. Moreover, the final crystallinity of films with various thickness was found decrease with thickness. The result of fitting our data to Avrami equation showed that the Avrami exponents decrease with film thickness.