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提出了一种含噪音重迭信号的综合处理方法 :先用傅里叶最小二乘法拟合噪音数据 ,然后对拟合后的信号求 2 .5次导数 ,在对模拟数据研究的基础上 ,讨论了求导后峰位漂移及其影响因素 ,给出了一个用于矫正峰位值的经验公式。用该方法对模拟和实际的紫外含噪音重迭信号进行处理 ,结果良好
A comprehensive processing method of noise overlapping signal is proposed. Firstly, the noise data is fitted by Fourier least square method, and then the derivative of the fitted signal is calculated to be 2.5. On the basis of the simulation data, The post-derivation peak position drift and its influencing factors are discussed, and an empirical formula for correcting the peak position value is given. Using this method to process simulated and actual UV-overlay signals with good results