论文部分内容阅读
建立了室温下使用多次透射反射红外光谱法(MTR-IR)测量单晶硅中间隙氧和代位碳含量的新红外光谱吸收方法,在理论和实验上证明了MTR-IR优于常规使用的单次垂直透射红外(IR)吸收测量方法。与IR法相比较,MTR-IR法的优点为:(1)间隙氧在1 107 cm-1处和代位碳在605 cm-1处的吸收峰与MTR-IR法中红外光透过硅片的的次数N(6~12)成线性增加的正比例关系,因此单晶硅中间隙氧和代位碳含量的检测限至少比IR法低一个数量级;(2)MTR-IR法测量薄硅片如0.2 mm的厚度时产生的干涉条纹强度是单次垂直透射红外吸收法(IR)的1/23、是单次Brewster角透射红外吸收法的1/11;(3)单次垂直透射红外吸收法(IR)1次只测量样品上的1个点,MTR-IR法则在更长的样品上1次测量多个样品点,每次测量更具有代表性。理论计算和实验结果都证实了MTR-IR吸收法测量晶体硅中间隙氧和代位碳杂质含量的高灵敏度、可靠性和重复性。
A new infrared absorption spectroscopy method for the determination of interstitial oxygen and substitutional carbon content in monocrystalline silicon at room temperature by using multiple transmission and reflection infrared spectroscopy (MTR-IR) was established. It was proved theoretically and experimentally that MTR-IR was superior to conventional Single vertical transmission infrared (IR) absorption measurement method. Compared with the IR method, the advantages of the MTR-IR method are as follows: (1) The absorption peak of interstitial oxygen at 1 107 cm-1 and the substitutional carbon at 605 cm-1 is similar to that of MTR-IR method (6-12) linearly proportional to the increase in the proportion of single-crystal silicon in the interstitial oxygen and substituting carbon detection limit at least one order of magnitude lower than the IR method; (2) MTR-IR method for measuring thin silicon films such as 0.2 The intensity of the interference fringes produced when the thickness is mm is 1/23 of a single vertical transmission infrared absorption method (IR), which is 1/11 of a single Brewster angle transmission infrared absorption method; (3) Single vertical transmission infrared absorption method IR) measures only one spot on a sample at a time. The MTR-IR method measures multiple sample spots on a longer sample, each time more representative. Both theoretical calculation and experimental results confirm the high sensitivity, reliability and repeatability of the MTR-IR absorption method for measuring the interstitial oxygen and substitutional carbon impurities in crystalline silicon.