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采用中频磁控溅射法制备了镱铒共掺Al2O3薄膜,铒镱掺杂浓度分别为0.3%,3.6%(摩尔分数,全文同).讨论了三价铒离子529 nm和549 nm光致发光的上转换机理.在291.8—573.3 K温度区间测量了两绿上转换光谱荧光强度比的温度特性,拟合表达式为R=5.37exp(-738/T).366 K温度时灵敏度最大,为0.0039 K-1.结果表明镱铒共掺Al2O3薄膜适合作为小型、高温和高灵敏的光学温度传感材料.
The Yb-erbium codoped Al 2 O 3 films were prepared by medium-frequency magnetron sputtering. The doping concentrations of erbium and ytterbium were 0.3% and 3.6%, respectively. The effects of three-valent erbium ions at 529 nm and 549 nm photoluminescence The temperature dependence of fluorescence intensity ratio of two green up-conversion spectra was measured at 291.8-573.3 K, and the fitted expression was R = 5.37exp (-738 / T). The sensitivity was the highest at 366 K 0.0039 K-1. The results show that Yb-erbium codoped Al 2 O 3 films are suitable as small, high temperature and high sensitive optical temperature sensing materials.