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通过对基底与膜层、膜层之间界面处非均匀性对增透膜增透性能影响的讨论,得到以下结论:在沉积初期,由于基底表面特性和沉积参数的波动,从而在基底与膜层之间产生过渡层,使增透性能减弱,对增透膜的增透效果影响较大;在膜层之间的过渡层,正余弦过渡使增透性能变强,双曲、指数使增透性能减弱,但影响较小,线性渐变基本没有影响。实验镀制了增透膜并对其进行拟合分析,发现基底与膜层以及膜层之间的过渡层按正余弦变化时与实验结果比较吻合,并给予了解释。
Through the discussion of the influence of the inhomogeneity of the interface between the substrate and the film and the film on the AR permeability of the AR coating, the following conclusions can be drawn: In the initial deposition, due to the fluctuation of the substrate surface characteristics and deposition parameters, The transition layer between the layer, so that the anti-permeability performance weakened anti-AR coating effect of greater impact; in the transition layer between layers, the cosine transition permeability enhancement performance, hyperbolic, exponential increase Permeability can be reduced, but with less effect, linear gradients have virtually no effect. The AR coating was plated and the fitting analysis was carried out. It was found that the transition layer between the substrate and the film and the film layer was in accordance with the experimental results when the sin-cos curve was changed, and gave an explanation.