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(一)引言 用晶体振荡法测量阴极蒸发率,一般是把阴极当作点蒸发源。这可能是为了便于计算蒸发率。在其它报道,例如文献[3]中,阴极则被当作是平面元蒸发源,蒸发物接受器被当作是阴极面法向上某处的一个平面元。 本文采取有效措施克服了晶体因温度变化引起的振荡频率漂移(晶体谐振频率漂移)对测量蒸发率的影响。这不仅提高了测量蒸发物引起的振荡频率变化(晶体谐振频率变
(A) Introduction Crystal oscillation method to measure the cathode evaporation rate, the cathode is generally used as a point evaporation. This may be for ease of calculation of evaporation rates. In other reports, such as [3], the cathode is considered as a planar element evaporation source and the evapotranspirator is considered as a planar element somewhere normal to the cathode surface. In this paper, effective measures to overcome the crystal temperature drift caused by oscillation frequency drift (crystal resonance frequency drift) on the measurement of evaporation rate. This not only improves the variation of the oscillation frequency caused by the measurement of the evaporant (the crystal resonance frequency changes