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考察和分析了当前流行的IC作业调度的算法模式。在此基础上,将制造系统中的作业调度回归到本原意义上,即制造资源优化配置必须保证制造步骤得以实施,得出既处理待加工硅片,也处理加工设备的双资源调度路线。结合判决式实例(Benchmark),给出IC制造领域中静态地匹配单机加工能力和加工片量的设备配置优化算法,以及动态地调度制造资源以维持工厂流水线式并行生产的作业调度方案,使之在机器运行效率、在制品数量和制造周期压缩、生产批的流程制造可预定性等方面,均取得最优化的效果。
Investigated and analyzed the current popular IC job scheduling algorithm model. On this basis, the job scheduling in the manufacturing system is returned to the original meaning, that is to say, the optimal allocation of manufacturing resources must ensure that the manufacturing steps are implemented, and the dual resource scheduling route that both processes the silicon to be processed and processes the processing equipment is obtained. Combined with the Benchmark, a device configuration optimization algorithm that statically matches the single-machine processing capability and processing quantity in the field of IC manufacturing is given, as well as the job scheduling scheme of dynamically scheduling manufacturing resources to maintain the pipeline parallel production in the factory. Optimized results have been achieved in terms of machine operating efficiency, product quantity and manufacturing cycle compression, process manufacturing processability of production lots, and more.