研究了沉积在硅油衬底表面的连续铝薄膜的微结构及其表面形貌 .与沉积在单晶硅表面的铝薄膜相比 ,两种铝薄膜均属颗粒结构 ,但硅油表面的铝薄膜具有颗粒尺寸较小、大小不均匀 ,表面起伏较大等特点 ,而且在该铝薄膜边缘的下表面 ,有一明显的波纹状楔型结构 ,其斜率仅为 10 -4 — 10 -5.实验结果表明 :这一现象是由于液体衬底的热膨胀行为引起的 .此外对样品的晶态也进行了研究 The microstructure and surface morphology of continuous aluminum thin films deposited on the surface of silicone oil substrate were studied.The two aluminum thin films were of a granular structure compared with the aluminum thin films deposited on the surface of monocrystalline silicon, Small particle size, uneven size, large surface undulation, etc. Moreover, there is an obvious corrugated wedge structure on the lower surface of the aluminum film edge with a slope of only 10 -4 -10 -5. Experimental results show that : This phenomenon is due to the thermal expansion behavior of the liquid substrate. In addition, the crystalline state of the sample was also studied