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对以 Si为衬底的钇钡铜氧 (分子式 :Y1 Ba2 Cu3O7-δ δ≥ 0 .5 ,简称 :YBCO)半导体薄膜的宽光谱响应特性进行了研究 .采用该薄膜作灵敏元的单元测辐射热计分别对红外波段 (1— 15μm)、亚毫米波段 (5个波长 )及毫米波 (3m m )进行光谱响应测试 ,结果表明这种半导体探测器不仅在红外波段 ,而且在亚毫米波甚至毫米波段都有良好的响应特性 .该薄膜是继 VO2 薄膜之后用于非制冷红外焦平面的一种新材料
The broad spectral response of yttrium barium copper oxide (Yb Ba2 Cu3O7- δ δ≥0.5, abbreviation: YBCO) semiconductor thin film with Si as substrate has been studied.Using this thin film as the sensing element, The spectrometer tested the infrared spectra (1-15μm), the sub-millimeter wavebands (5 wavelengths) and the millimeter wave (3m m) spectrum respectively. The results show that this kind of semiconductor detector not only in the infrared region but also in the sub-millimeter wave Mm band has a good response characteristics of the film is VO2 film following the uncooled infrared focal plane for a new material