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准分子激光加工是解决MEMS中微摩擦问题的手段之一。通过研究准分子激光加工表面轮廓的分形特性,探索准分子激光加工表面轮廓分析中的应用问题,如分形参数表征和分形插值模拟等。
Excimer laser processing is one of the means to solve the micro-friction problem in MEMS. By studying the fractal characteristics of the excimer laser processing surface profile, the application problems of the excimer laser processing surface profile analysis are explored, such as fractal parameter characterization and fractal interpolation simulation.