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理论分析了980nm高功率垂直腔面发射激光器(VCSEL)的器件特性与其分布布拉格反射镜(DBR)反射率的依赖关系,并计算了具有不同有源区直径的VCSEL的输出特性.分析了具有不同有源区直径的VCSEL在不同DBR反射率条件下的连续输出特性曲线,发现DBR反射率的改变会对有源区直径不同的VCSEL产生不同程度的影响.为了验证理论分析的结果,进行了器件测试实验.实验结果表明,有源区直径为500μm的VCSEL,当其N-DBR反射率分别为99.7%及99.2%时,在连续注入电流为6A时,其输出功率分别为2.01W和2.09W;而有源区直径为200μm的VCSEL,当N-DBR反射率为99.7%及99.2%时,连续注入电流为3A时,其输出功率分别为0.64W及1.12W.器件测试结果有效验证了理论分析的结论.
The dependence of the device characteristics of the 980nm high power vertical cavity surface emitting laser (VCSEL) on the reflectivity of the distributed Bragg reflector (DBR) is analyzed theoretically and the output characteristics of VCSELs with different active region diameters are calculated. The results show that the change of DBR reflectivity will affect the VCSELs with different diameters in different active regions to some extent.In order to verify the theoretical analysis results, The experimental results show that the VCSEL with active region diameter of 500μm has an output power of 2.01W and 2.09W at a continuous injection current of 6A when the reflectivity of N-DBR is 99.7% and 99.2% While the VCSEL with active area diameter of 200μm has the output power of 0.64W and 1.12W when the reflectivity of N-DBR is 99.7% and 99.2% and the continuous injection current is 3A, respectively. The device test results validate the theory Analysis of the conclusions.