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利用微波等离子体增强化学气相沉积方法 ,在多孔二氧化硅基底上制备了大面积取向一致的碳氮纳米管薄膜 .采用扫描电子显微镜、透射电子显微镜和能量散射X射线能谱仪分别进行了纳米管的形貌、结构和成分的研究 .结果表明这种纳米管的直径一般为 10 0nm ,长度可达 2 0 μm ,为纳米钟的线性聚合物 .纳米管的成分中同时均匀含有C ,N两种元素 .进一步的X射线光电子能谱结果证明了C与N之间以成键结合 .这预示着一种新的C1-xNx(x =0 .16± 0 .0 1)相出现在纳米管结构中 .
Carbon nanotube films with uniform orientation were prepared on porous silica substrates by microwave plasma enhanced chemical vapor deposition (CVD). The scanning electron microscopy (SEM), transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy The morphology, the structure and the composition of the nanotubes were studied.The results show that the nanotubes have a diameter of 100 nm and a length of up to 20 μm, which is a linear polymer with nanometer length.The nanotubes also contain C, N Further elemental X-ray photoelectron spectroscopy demonstrated the formation of a bond between C and N. This indicates that a new phase of C1-xNx (x = 0 .16 ± 0 .0 1) appears in the nanometer Tube structure.