准确测定材料中的成分及杂质的含量和其深度分布在新材料的研制中有重要作用。近年来,在新材料的研制和改性中经常用各种方法加入不同量的氢成分来改变材料的各种性能。由于卢瑟福背散射(RBS)不能测量H,人们通常用RBS测其它元素,再用a束弹性反冲法测H。两次测量存在截面归一和 Accurate determination of the composition of the material and the content of impurities and their depth distribution in the development of new materials play an important role. In recent years, in the development and modification of new materials, various methods are often used to add different amounts of hydrogen components to change various properties of the material. Since Rutherford backscattering (RBS) can not measure H, people usually measure other elements with RBS and then measure H with a bunch of elastic recoils. The cross-section normalized sum exists in two measurements