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微波等离子体可以通过无极放电方式产生,相对其它放电方式而言,容易在高气压下维持较高容量,有较好的工业应用价值,但目前在较高气压下使用的微波等离子体装置还不成熟。为此,介绍了一种新型的微波等离子体反应腔,包括该腔体的结构和设计原理,并将其与现有的纯狭缝式微波反应腔作了比较,以说明两缝结合腔体的优点;通过引入喷气电离管前后微波激发所需要的能量变化以说明电离管的作用:它利用环形波导的狭缝天线和大缝向腔内传输微波以激发和维持等离子体,这种两缝结合的形式使反应腔内高场强区域扩大,有助于大面积等离子体的产生;同时,该腔体还配套有一喷气电离管,通过其产生的电离流的作用,有效降低了微波激发等离子体所需的能量。通过摄像头观察到的实验现象表明,在大气压下其产生的等离子体是相对均匀的,且覆盖面积大,可有效的应用于工业中。
Compared with other discharge methods, microwave plasma can be produced by electrodeless discharge. It is easy to maintain high capacity under high pressure and has better industrial application value. However, the microwave plasma apparatus currently used at a higher pressure is not yet available mature. To this end, a new type of microwave plasma reaction chamber is introduced, including the structure and design principle of the chamber, and compared with the existing purely slit microwave reaction chamber to illustrate that the two-slit combined chamber The advantages of the ionization tube before and after the introduction of jet ionization tube to stimulate the energy required to explain the role of ionization tube: It uses the ring waveguide slot antenna and the large gap to the cavity microwave transmission to stimulate and sustain the plasma, this two-seam Combined with the form of the reaction chamber to expand the high field strength, contribute to the production of large-area plasma; the same time, the cavity is also equipped with a jet ionization tube, through its ionization flow generated by the effective reduction of the microwave excitation plasma Body required energy. The experimental phenomena observed by the camera shows that the plasma generated at atmospheric pressure is relatively uniform and covers a large area and can be effectively used in the industry.