基于杠杆的微机械陀螺结构设计与仿真

来源 :微纳电子技术 | 被引量 : 0次 | 上传用户:agz100
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
提出了一种基于机械杠杆放大机构的微机械陀螺设计方案,用于提高微机械陀螺的灵敏度和精度。该杠杆放大机构使用在陀螺的驱动模态中,通过杠杆将驱动梳齿位移放大后传递到质量块上,在陀螺驱动模态谐振频率一定的情况下增大了质量块在驱动方向的运动速度,提高了陀螺敏感模态的科氏力及陀螺表头的机械灵敏度,从而提高陀螺系统的灵敏度和精度。在Coventor-ware中对陀螺结构进行了系统级仿真,仿真结果表明在杠杆动力臂和阻力臂长度之比为1∶5.2时,陀螺机械灵敏度放大了5.9倍。因此,通过在微机械陀螺驱动模态中使用杠杆结构可以提高其灵敏度和精度。 A micro-mechanical gyro design scheme based on mechanical lever amplification mechanism is proposed to improve the sensitivity and precision of the micro-mechanical gyro. The lever amplification mechanism is used in the driving mode of the gyroscope. The displacement of the driving comb gear is amplified and transmitted to the mass by the lever. When the resonance frequency of the gyroscopic driving mode is constant, the moving speed of the mass in the driving direction is increased , Which improves the Coriolis force of the gyro sensitive mode and the mechanical sensitivity of the gyro meter, so as to improve the sensitivity and accuracy of the gyro system. In Coventor-ware, the gyroscope structure is simulated at the system level. The simulation results show that the sensitivity of the gyroscope is increased by 5.9 times when the ratio of the lever arm to the arm length is 1: 5.2. Therefore, the sensitivity and accuracy can be improved by using the lever structure in the micromechanical gyro-driven mode.
其他文献
This work was conducted to evaluate the effectiveness and influence factors of vegetation on phosphorus (P) removal from reclaimed water in constructed wetlands
This work describes a systematic approach to the development of a method for simultaneous determination of three classes of veterinary antibiotics in the suspen
Previous studies have demonstrated that petal shape and size in legume flowers are determined by two separate mechanisms,dorsoventral (DV) and organ internal (I
根据修正波数应在充分大的波数范围内接近准确波数的思想,构造了优化的3对角4阶跳点紧致差分格式及插值格式。优化跳点紧致格式仍然具有4阶精度,但提高了分辨率,能够在更大的
Background Fenvalerate (FEN) has been demonstrated to be a reproductive toxicant in humans and rodents. However,little is known about whether short-term exposur
In temperate regions,latewood is produced when cambial activity declines with the approach of autumnal dormancy.The understanding of the temporal (cambium activ
Background Acute lung injury (ALl) is a common critical disease in emergency care.Oxidative stress plays an important role in the pathogenesis of ALl.Endogenous
Objective To investigate the diversity and the distribution of host animal species of hantavirus and the effect on human health in Jiuhua Mountain area, China.
Background Hepatoid adenocarcinoma of the stomach (HAS) is a rare type of gastric carcinoma, which has its unique clinicopathological features and poorer progno
A method based on controlling the complexation-precipitation equilibrium of metal ions was proposed to selectively recover nickel and copper from hydroxide slud