论文部分内容阅读
传统的真空设计中,对于真空室设计,为了节约加工成本,采用易加工简单的真空室,对抽真空系统设计,经常选用极限真空较高的机械泵、罗茨泵、扩散泵组合系统,但当前从节能减排的低碳要求出发,往往是不合理的,而且用户日后在长期运行中,能耗很大,使应用真空的产品后续成本大为提高。为了创新设计,本文提出真空设计中应更注重节能减排的低碳原则的新思考。
Traditional vacuum design, vacuum chamber design, in order to save processing costs, easy to use simple vacuum chamber, the vacuum system design, often use the ultimate vacuum high mechanical pump, Roots pump, diffusion pump combination system, but The current low-carbon energy-saving emission reduction requirements are often unreasonable, and users in the long run in the future, a large energy consumption, the application of vacuum follow-up costs greatly improved. In order to innovate the design, this paper puts forward a new thinking that the vacuum design should pay more attention to the low-carbon principle of energy conservation and emission reduction.