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研究了Ti/TiN多层膜的显微结构,横截面试样的透射电镜研究和二次离子质谱深度分析均表明,该膜具有周期变化的多层结构,即:基体/FeTi/Ti/Ti_2N/TiN/Ti_2N/Ti/Ti_2N/TiN…Ti/Ti_2N/TiN.制备了压痕试样的断口试样,并用扫描电镜进行了观察.结果表明,多层硬膜在压痕试验时发生形变,出现压痕坑,在其周围形成材料堆积.随着所加载荷的增加,形变区扩大,越过膜/基界面进入基体,引起膜内的层间开裂和在膜/基界面上形成孔洞,研究结果表明,和单层TiN相比,Ti/TiN多层膜具有较好的韧性.
The microstructure of Ti / TiN multilayers was investigated. Transmission electron microscopy (TEM) and depth analysis of secondary ion mass spectra of the Ti / TiN multilayer showed that the Ti / TiN / Ti_2N / Ti / Ti_2N / TiN ... Ti / Ti_2N / TiN. Fracture specimens of indentation samples were prepared and observed by scanning electron microscopy. The results show that the multilayer hard coatings deform during indentation test, Depression pits occur and accumulate material around them, and as the applied load increases, the deformation zone expands beyond the film / base interface into the substrate, causing interlamellar cracks and voids in the film / base interface The results show that Ti / TiN multilayers have better toughness than single TiN.