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本文分析了化学机械抛光中影响Φ12 5mm硅抛光片成品率的原因 ,并针对各种缺陷进行工艺研究和探索 ,提出了相应的解决方案
This paper analyzes the chemical mechanical polishing Φ12 5mm silicon polishing sheet yield reasons, and for various defects of the process of research and exploration, and put forward the corresponding solutions