高纯氢和超高纯氢已在电子工业中获得日益广泛的应用。本文根据低温变温吸附法制取高纯氢的原理和特点力图说明其特别适合于制取超高纯氢,并认为运用于电子工业在一定条件下是可能的和经济的。文章分析了提高氢气纯度的条件,还介绍了若干操作经验。 High purity hydrogen and ultra high purity hydrogen have gained increasingly widespread use in the electronics industry. In this paper, the principle and characteristics of high purity hydrogen prepared by cryogenic temperature swing adsorption method are illustrated in order to illustrate that it is especially suitable for preparing ultrahigh purity hydrogen and is considered possible and economical to use in the electronics industry under certain conditions. The paper analyzes the conditions to improve the purity of hydrogen, also introduced a number of operating experience.