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本文采用氩激光倍频及准分子激光,对金属膜层的沉积、化合物膜层沉积、光诱导化学光刻以及激光化学诱导掺杂等固体表面化学过程作了实验研究,并对其中一些过程的机理作了探讨.
In this paper, argon laser multiplier and excimer laser were used to study the solid surface chemical processes such as metal film deposition, compound film deposition, photoinduced chemical photolithography and laser chemical induced doping. Some of these processes Mechanism was discussed.