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为了能得到植入在生物体内,用于体内微型电子系统与体外设备信号和能量传输的高品质因数Q值和高电感量L值的MEMS电感线圈,本文首先对MEMS电感模型做了理论分析,然后在充分考虑功率传输要求、植入器件体积的限制以及制作工艺的可实现性的情况下,用高精度的3D电磁仿真软件HFSS,对电感的主要参数如圈数N、线宽W、导线间隙S、导线厚度H、导线材料M和衬底电导率σ作了优化设计。最终确定N=10、W=25μm、S=50μm、H=48μm、M为Cu、σ=0.1S/m。数值仿真的结果显示Q=17.6,L=55nH,=240MHz,=1.2GHz,它们能很好地符合能量传输的功率要求和信号传输的带宽要求。
In order to get the MEMS inductor with high quality factor Q and high inductance L, which is implanted in the organism and used for the signal and energy transmission of microelectronic systems and in vitro devices in vivo, this paper first makes a theoretical analysis of the MEMS inductor model, Then, considering the requirements of power transmission, the volume of implanted devices and the realization of the fabrication process, the main parameters of inductance, such as the number of turns N, the width W, the wires The gap S, the thickness H of the wire, the material M of the wire and the conductivity σ of the substrate are optimized. Finally, N = 10, W = 25 μm, S = 50 μm, H = 48 μm, M Cu and σ = 0.1 S / m. Numerical simulation results show that Q = 17.6, L = 55nH, = 240MHz, = 1.2GHz, they can well meet the power requirements of energy transmission and signal transmission bandwidth requirements.