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本文采用100 eV的He+对钨进行辐照实验,考察了辐照温度变化(室温-800°C)对钨材料的表面损伤作用。分别采用扫描电镜(Scanning Electron Microscope,SEM)、透射电镜(Transmission Electron Microscope,TEM)、导电原子力显微镜(Conductive Atomic Force Microscopy,CAFM)以及X射线衍射(X Ray Diffraction,XRD)技术对辐照后样品的微观形貌、内表面缺陷分布以及晶格结构进行了分析。结果表明,He+辐照后钨样品表面出现了纳米绒毛结构层,这种结构层组织间的间距及覆盖率都随辐照温度的增加而增加。纳米结构层会造成样品表面损伤,产生表面离域化,但不会引起钨晶相的改变。通过无损伤的CAFM检测技术证实了样品表面绒毛结构层的形成与样品内表面纳米尺寸He泡的形成有关。
In this paper, the irradiation of tungsten with 100 eV He + was studied. The effect of irradiation temperature (room temperature -800 ° C) on the surface damage of tungsten was investigated. The irradiated samples were characterized by Scanning Electron Microscope (SEM), Transmission Electron Microscope (TEM), Conductive Atomic Force Microscopy (CAFM) and X-ray Diffraction (XRD) The microstructure, the distribution of internal surface defects and the lattice structure were analyzed. The results showed that the nanorod structure layer appeared on the surface of the tungsten sample after He + irradiation, and the spacing and the coverage of the structure layer increased with the increase of irradiation temperature. Nanostructured layers cause damage to the sample surface and cause surface delocalization, but do not cause changes in the crystalline phase of tungsten. The nondestructive detection of CAFM confirmed that the formation of villus structure layer on the sample surface was related to the formation of nano-sized He bubbles on the inner surface of the sample.