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与传统探针相比,使用碳纳米管探针能探测到更精细的样本表面形貌,为减小针尖形貌和尺寸造成的测量误差提供了一个良好途径。然而,在普通探针上黏贴碳纳米管时总是难以避免地出现一个倾斜角度,它使得对刻线样本进行测量时只能获得单侧较精确的边墙数据,而另外一侧失真较大。提出一种双图像拼接方法,样本在经过一次测量以后被旋转180°,然后重新测量,分别保留两次测量中较好的一侧边墙测量数据,并把它们拼接成一幅更接近真实样本的图像。采用基于ICP算法的图像配准技术匹配两次测量图像,消除两次测量的位置偏差, 并应用双线性插值和最小二乘拟合方法对配准后的图像进行处理,计算得到更准确的线宽和边墙角等单刻线样本的特征尺寸值。
Compared with traditional probes, the use of carbon nanotube probes to detect finer sample surface topography provides a good way to reduce measurement errors caused by tip morphology and size. However, sticking carbon nanotubes onto common probes is always inevitable with a tilt angle, which makes it possible to obtain only accurate one-sided sidewall data for the scribed samples, while the other side is distorted Big. A two-image splicing method is proposed, in which the sample is rotated 180 ° after one measurement and then remeasured to retain the measured data of the better one of the two sidewalls, respectively, and spliced into a closer-to-real sample image. The image registration technology based on ICP algorithm was used to match the two measurement images and eliminate the position deviation of the two measurements. Bilinear interpolation and least-squares fitting method were used to deal with the image after registration. More accurate Line width and edge angle and other single-line sample feature size values.