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介绍了类金刚石膜DLC的形成原理、制备方法和发展现状,总结了DLC在机械、电子、声学、光学和医学等领域的应用状况以及存在的问题。
The formation principle, preparation method and development status of DLC diamond film are introduced. The application status and existing problems of DLC in mechanical, electronic, acoustic, optical and medical fields are summarized.