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聚焦离子束(FIB)技术是一种集形貌观测、定位制样、成份分析、薄膜淀积和无掩模刻蚀各过程于一身的新型微纳加工技术。它突破了只能对表层成像和分析的局限,可以对样品进行三维的、表面下的观察和分析,也可以对样品材料进行切割研磨和沉积特定材料,用它可以获得以前无法得到的样品信息。从而为研究人员和制造人员提供了一种对多种样品在纳米尺度进行修改、制作和分析的有效工具。
Focused ion beam (FIB) technology is a new micro-nano processing technology that integrates the morphological observation, positioning sample preparation, composition analysis, thin film deposition and maskless etching in one process. It breaks through the limitations of imaging and analysis of the surface only, allowing for three-dimensional, subsurface observation and analysis of the sample, cutting and grinding of the sample material and depositing of specific materials for obtaining previously unavailable sample information . This provides researchers and fabricators with an effective tool for modifying, fabricating and analyzing multiple samples at the nanometer scale.