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测量星敏感器成像面与安装面的位姿关系,对系统成像质量及精度补偿具有重要意义.本文设计了一套基于三维导轨的探测器成像面姿态检测设备,针对检测设备的系统误差提出了一种误差快速补偿方法,通过对标准件的测量完成对导轨运动误差在Z方向分量的标定.将X轴和Y轴运动体的位移量与测量误差在Z方向的分量数据写入标定文件,以高效完成误差的补偿.通过与高精度激光干涉仪测量结果对比,Y轴测量误差在2.9μm内,X轴测量误差在1.5μm内,达到了测量要求.
To measure the pose relationship between the imaging surface of the star sensor and the mounting surface is of great significance to compensate the imaging quality and accuracy of the system.This paper designs a set of attitude detection device for the imaging plane of the detector based on three- A method for fast error compensation is to calibrate the component of the movement error of the guide rail in the Z direction by measuring the standard parts The component data of the displacement and the measurement error of the X and Y axis moving bodies in the Z direction are written into the calibration file, Which can compensate the error effectively.Comparing with the measurement result of high precision laser interferometer, the measurement error of Y axis is within 2.9μm and the measurement error of X axis is within 1.5μm, which meets the measurement requirements.