一、前言为测量一个物体的表面轮廓,通常采用可见光或莫尔条纹干涉测量法,但这种方法的可测范围有限制,前一种方法在10个波长的可测区域内具有高灵敏度,仅仅适用于反射镜表面,而后一种方法在 mm～cm 的可测区域内灵敏度仅为万分之一量级,精密测量几乎不可能。所以,在工业上用这两种方法测量的物件将受到限制。为此要求有一种方法其灵敏度和 I. INTRODUCTION In order to measure the surface profile of an object, visible or moire fringe interferometry is usually used. However, the measurable range of this method is limited. The former method has high sensitivity in the measurable range of 10 wavelengths, Only for the mirror surface, and the latter method in the mm ~ cm of the sensitivity of only one tenth of an order of magnitude sensitivity, precision measurement is almost impossible. Therefore, the industrial use of these two methods to measure the object will be limited. To do this requires a method for its sensitivity and