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Teflon film was prepared by ion beam enhanced deposition method. The structure and microtri-bological properties were studied by PHl-5300, FT-lR, XRD and atomic force and friction forcemicroscope (AFM/FFM). The results show that the deposited Teflon is in crystalline state, andits structure is the same as the buIk Teflon. There are two periods in the friction and wear testsfor Teflon film. When the load is less than 70 nN, the micro friction force is linear with the load,and the Teflon does not have the lubricity. But when the load is greater than 70 nN, the frictionforce of Teflon film will stay nearly constant, and worn marks will be created in the friction andwear process. The worn depth of Teflon film increases linearly with the Ioad.
The structure and microtri-bological properties were studied by PHl-5300, FT-IR, XRD and atomic force and friction force microscope (AFM / FFM). The results show that the deposited Teflon is in crystalline state, andits structure is the same as the buIk Teflon. There are two periods in the friction and wear testsfor Teflon film. When the load is less than 70 nN, the micro friction force is linear with the load, and the Teflon does not worn the lubricationity. But when the load is greater than 70 nN, the frictionforce of Teflon film will stay nearly constant, and worn marks will be created in the friction andwear process. The worn depth of Teflon film increases linearly with the Ioad.