半导体集成工艺中的翻版,是用精缩母版复制出直接供光刻用的掩膜工作版。它对集成制版工艺来说是关键的环节,对于批量生产尤其重要。当然使用母版做光刻版还有它的优越之处:线条尺寸精度高,图形边缘过渡区小。但从经济效益来看,较之翻版成本高,工时和设备耗费大,各套版之间不可互套。所以一般都采用翻版的方法制作工作版。 Semiconductor integrated technology in the piracy, is the use of fine mastering copy directly for the lithography mask working version. It is a key part of the integrated platemaking process and is especially important for mass production. Of course, the use of lithography master plate as well as its advantages: high-precision line size, graphics, the edge of the transition zone is small. However, from the economic point of view, compared with the pirated version of the high cost of working hours and equipment, each set of mutually incompatible. So generally use the method of making a copy version of the work version.