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我们要研究的是集成光电器件,在此器件中,光纤维被耦合到光信道波导中,而光平板波导和光信道波导被耦合到探测器上。采用SiO_2/Si衬底,可以制作低损耗光波导,对信道波导和光纤维采用光滑的V形沟道,使我们能获得信道和复杂的探测器结构如电荷耦合器件(CCD)直线阵列。我们将讨论一种CCD平板波导探测器耦合的结构,实验证明,这种结构具有下列特性:沿直线阵列具有高度的均匀性;能将额外的光散射减到最弱;具有很低的电荷转移失效。本文证实了光从光纤维被耦合到信道波导,又从信道波导阵列被耦合到CCD直线阵列。本文还讨论了各种器件结构在集成光学频谱分析、光学横向滤波以及若干纤维光通讯信道的时间复用方面的应用。
We are looking at integrated optoelectronic devices where the optical fiber is coupled into an optical channel waveguide and the optical slab waveguide and the optical channel waveguide are coupled to the detector. Using a SiO 2 / Si substrate, a low-loss optical waveguide can be fabricated and a smooth V-shaped channel can be used for the channel waveguides and optical fibers, allowing us to obtain channels and complex detector structures such as linear arrays of charge coupled devices (CCDs). We will discuss a CCD slab waveguide detector coupled structure that has been experimentally demonstrated to have the following properties: a high degree of uniformity along a linear array; the ability to minimize extra light scattering; a very low charge transfer Failure. This paper demonstrates that light is coupled from the optical fiber to the channel waveguide and from the channel waveguide array to the CCD linear array. This article also discusses the application of various device structures in integrated optical spectral analysis, optical lateral filtering, and time multiplexing of several fiber optical communication channels.