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声电荷输运技术是80年代初出现的一种新型高频高速信号处理技术,是模拟信号处理领域的重要发展方向。文内报道了声电荷输运延迟线的设计考虑、器件结构和制作,讨论了所采用的一些关键工艺,给出了器件性能。声电荷输运延迟线样品具有1μs的延迟时间,声表面波频率为358MHz。
Acoustic charge transport technology is a new type of high-frequency and high-speed signal processing technology appearing in the early 1980s, which is an important development direction in the field of analog signal processing. This paper reports the design considerations, device structure and fabrication of the acoustic charge transport delay line, discusses some of the key processes used, and gives the device performance. The acoustic charge transport delay line sample has a 1 μs delay time and the SAW frequency is 358 MHz.