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采用溶胶-凝胶法(sol-gel)制备出氧化铁-氧化铟复合材料,利用提拉法将复合材料固定在锡掺杂玻璃光波导表面研究出能够检测二甲苯气体的Fe2O3-In2O3复合薄膜/锡掺杂玻璃光波导气敏元件。将气敏元件固定在气体检测系统中对挥发性有机气体进行检测。实验结果表明,Fe2O3-In2O3复合薄膜/锡掺杂玻璃光波导气敏元件对二甲苯气体具有较好的响应,其响应浓度范围为1×10-3～1×10-5(V/V)。在常温下该敏感元件对于浓度为1×10-5(V/V)的二甲苯蒸汽有比较明显响应,其响应和恢复时间分别为5s和20s。Fe2O3-In2O3复合薄膜/锡掺杂玻璃光波导气敏元件具有灵敏度高、响应速度快、制作工艺简单和可逆性好等特点。
The iron oxide-indium oxide composite was prepared by sol-gel method. The composite was fixed on the surface of the tin-doped glass optical waveguide by Czochralski method. The Fe2O3-In2O3 composite film capable of detecting xylene gas / Tin-doped glass optical waveguide gas sensor. The gas sensor is fixed in the gas detection system to detect volatile organic gases. The experimental results show that the Fe2O3-In2O3 composite thin film / tin-doped glass optical waveguide gas sensor has a good response to xylene gas with a response concentration range of 1 × 10-3 to 1 × 10-5 (V / V) . At room temperature, the sensor responds more clearly to xylene vapor at a concentration of 1 × 10-5 (V / V) with a response and recovery time of 5s and 20s, respectively. Fe2O3-In2O3 composite film / tin-doped glass optical waveguide gas sensor with high sensitivity, fast response, the production process is simple and reversible and so good.