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本文根据现有国内外期刊资料,综合薄膜温度传感器的研制生产状态和发展动向,认为按其固有特点、优势,它有较强的竞争力。从它的结构和工艺来看,有如下特点:热响应速度快,电阻阻值范围宽,选材广泛,机械性好,精度高,体积小,重量轻,成本低。可平面化,集成化。该文介绍了国内外巳研制或生产的几种薄膜温度传感器:SiC,SnSe、MnCo、V_3O_5、Ti、Ni、Gc、Pt等,并介绍它们的工艺、结构、特点和应用。这里着重指出Pt薄膜具有线性的电阻温度关系,适合二次仪表配套,并举出它在表面测温、瞬时测温、真空内测温和一般情况下的应用。该文认为开发薄膜技术、研制和生产各类薄膜传感器,满足四化需要,意义深远,前程广阔。
Based on the existing domestic and foreign periodicals, this paper synthesizes the research and production status and development trend of the thin-film temperature sensor, and holds that it has strong competitiveness in terms of its inherent characteristics and advantages. From its structure and process point of view, has the following characteristics: thermal response speed, wide resistance range, wide selection, good mechanical, high precision, small size, light weight, low cost. Can be planarized, integrated. This paper introduces several kinds of thin film temperature sensors developed or produced at home and abroad: SiC, SnSe, MnCo, V_3O_5, Ti, Ni, Gc, Pt and so on, and introduces their technology, structure, characteristics and applications. It is emphasized here that the Pt film has a linear resistance temperature relationship, suitable for secondary instrument supporting, and gives its surface temperature measurement, instantaneous temperature measurement, vacuum temperature measurement and under normal circumstances. The paper believes that the development of thin film technology, development and production of various types of thin film sensors to meet the four needs, far-reaching, promising future.