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利用热丝化学气相沉积法研究了氮气浓度对金刚石薄膜成核和生长的影响 .实验发现氮气的加入对金刚石成核密度影响不大 ,但促进了已形成的金刚石核的长大 .适量的氮气不仅使金刚石生长速率得到很大的提高 ,而且稳定了金刚石薄膜 (10 0 )面的生长 ,使金刚石薄膜具有更好的 (10 0 )织构 .利用原位光发射谱对衬底附近的化学基团进行了研究 .研究表明 ,氮气的引入使得金刚石生长的气相化学和表面化学性质发生了很大变化 .含氮基团的萃取作用提高了金刚石表面氢原子的脱附速率 ,从而提高了金刚石膜的生长速率 .而含氮基团的选择吸附使金刚石(10 0 )取向变得化学糙化 (chemicalroughening) ,这种化学糙化使得 (10 0 )晶面生长速率大于其他晶面 ,最终使金刚石薄膜呈现 (10 0 )织构 .
The effects of nitrogen concentration on the nucleation and growth of diamond films were investigated by hot filament chemical vapor deposition method. It was found that the addition of nitrogen had little effect on the diamond nucleation density but promoted the growth of diamond nuclei. Not only the diamond growth rate is greatly improved, but also the growth of the (10 0) plane of the diamond film is stabilized, so that the diamond film has a better (100) texture.The in-situ photoemission spectroscopy The results show that the introduction of nitrogen makes the gas phase chemical and surface chemical properties of the diamond have undergone great changes.The extraction of nitrogen-containing groups increased the desorption rate of hydrogen atoms on the diamond surface, thereby increasing the diamond The growth rate of the film, while the selective adsorption of nitrogenous groups makes the orientation of the diamond (10 0) become chemical roughening, the chemical roughening makes the growth rate of the (10 0) plane larger than that of the other planes, Diamond films show a (100) texture.