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据《今日电子》2005年第11期报导,松下电工控制机器事业部推出了采用 MEMS技术的三款产品,分别是超小型MEMS高频继电器、面向车载用途的单轴加速度传感器、适用于小型数字设备的三轴加速度传感器。 MEMS继电器ME-X融合了MEMS和机械继电器技术,采用精密活动结构和磁回路,大小仅为4.00 mm×2.5 mm×1.3 mm,同时具有低接触阻抗、接点间高绝缘性、可在高频且宽频带下使用的机械式继电器的优点和小型、高效率、可高速开闭的半导体继电器的优点。继电器在6 GHz时的电阻为50 Ω,插入
According to “Today’s Electronics” No. 11 of 2005, Matsushita Electric Industrial Machinery Co., Ltd. introduced three products using MEMS technology, namely, ultra-small MEMS high-frequency relays for automotive applications, single-axis acceleration sensor for small digital Three-axis acceleration sensor for the device. MEMS Relays The ME-X incorporates MEMS and mechanical relay technology with a precision moving construction and a magnetic circuit measuring just 4.00 mm × 2.5 mm × 1.3 mm in size with low contact resistance and high insulation between contacts, The advantages of mechanical relays used in a wide frequency band and the advantages of small, high efficiency, high-speed opening and closing of semiconductor relays. The relay has a resistance of 50 Ω at 6 GHz and is inserted