【摘 要】
：
The conformal mapping of an electric field has been employed to develop an accurate parasitic capacitance model for nanoscale fin field-effect transistor (FinFE
【机 构】
：
Shanghai Key Laboratory of Multidimensional Information Processing and the Department of Electrical
论文部分内容阅读
The conformal mapping of an electric field has been employed to develop an accurate parasitic capacitance model for nanoscale fin field-effect transistor (FinFET) device.Firstly,the structure of the dual-layer spacers and the gate parasitic capacitors are thoroughly analyzed.Then,the Cartesian coordinate is transferred into the elliptic coordinate and the equivalent fringe capacitance model can be built-up by some arithmetical operations.In order to validate our proposed model,the comparison of statistical analysis between the proposed calculation and the 3D-TCAD simulation has been carried out,and several different material combinations of the dual-k structure have been considered.The results show that the proposed analytical model can accurately calculate the fringe capacitance of the FinFET device with dual-k spacers.
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