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研究了含有添加Pt的SnO_(2-x)薄膜。SnO_(2-x)叫薄膜是由反应电子束蒸发的烧结SnO_(2-x)粉末而制成。沉积薄膜用H_2PLCl_6·6H_2O水溶液浸渍,并加热。用电子分光仪进行化学分析、研究表面结构和制成膜的成份,用x射线衍射仪进行研究薄膜的电特性和添加剂Pt的效应。
The Pt-containing SnO 2-x films were investigated. SnO_ (2-x) film is called by the reaction of electron beam evaporation sintered SnO 2-x powder made. The deposited film was impregnated with H 2 PLCl 6 · 6H 2 O aqueous solution and heated. The chemical analysis was carried out with an electron spectrometer to study the surface structure and the composition of the film. The electrical properties of the film and the effect of the additive Pt were investigated using an X-ray diffractometer.