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】微硅加速度计是近年来发展起来的新型器件，在结构设计阶段必须对其进行力学分析，以期对使用条件下的摆片位移、应力等作到心中有数。本文采用有限元分析方法对挠性摆式微硅加速度计进行有限元分析，其中包括对未封装及封装后实体单元进行敏感轴位移、侧向位移、横向灵敏度、受力情况等分析。分析结果表明所设计的微硅加速度计符合仪表性能要求。
Micro-silicon accelerometer developed in recent years, a new type of device, in the structural design phase of the mechanical analysis must be carried out in order to use the conditions of the displacement of the chip, stress, etc. to be aware of. In this paper, the finite element analysis method is used to analyze the finite element analysis of the flexible pendulum micro-silicon accelerometer, including the analysis of the sensitive axis displacement, lateral displacement, lateral sensitivity and force conditions of unpackaged and encapsulated solid elements. The analysis results show that the micro-silicon accelerometer designed meets the performance requirements of the instrument.