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采用微分-积分法和裂解质谱研究了聚氯代对二甲苯膜(Parylene C膜)的非等温热降解行为。实验结果表明,Parylene C膜在N2中的热降解符合二级化学反应,其动力学模型方程式为dα/dt=Aexp(-E/RT)(1-α)2,平均表观活化能E=139kJ/mol,在N2中裂解产物主要为芳香烃和芳香醛。
The non-isothermal thermal degradation behavior of Parylene C film was studied by differential-integral method and lysis mass spectrometry. The experimental results show that the thermal degradation of Parylene C membrane in N2 is in accordance with the second-order chemical reaction. The kinetic model equation is: dα / dt = Aexp (-E / RT) (1-α) 2, and the average apparent activation energy E = 139kJ / mol, pyrolysis products in N2 are mainly aromatic hydrocarbons and aromatic aldehydes.