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就Digisorb2600型物理吸附仪的真空系统拟出了表格形式的基本检漏步骤,并在此基础上详细介绍了几例特殊真空故障的查找、分析及解决方法。
On the basis of the Digisorb2600 physical adsorption instrument vacuum system, a basic form of leak detection procedure was developed. Based on this, several cases of special vacuum fault finding, analysis and solution were introduced.